JPH0186234U - - Google Patents
Info
- Publication number
- JPH0186234U JPH0186234U JP18339087U JP18339087U JPH0186234U JP H0186234 U JPH0186234 U JP H0186234U JP 18339087 U JP18339087 U JP 18339087U JP 18339087 U JP18339087 U JP 18339087U JP H0186234 U JPH0186234 U JP H0186234U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- clean
- section
- clean chamber
- cleaning section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18339087U JPH0186234U (en]) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18339087U JPH0186234U (en]) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186234U true JPH0186234U (en]) | 1989-06-07 |
Family
ID=31474812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18339087U Pending JPH0186234U (en]) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186234U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6127637A (ja) * | 1984-07-17 | 1986-02-07 | Nec Corp | 半導体ウエハ乾燥装置 |
-
1987
- 1987-11-30 JP JP18339087U patent/JPH0186234U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6127637A (ja) * | 1984-07-17 | 1986-02-07 | Nec Corp | 半導体ウエハ乾燥装置 |